| 000 | 00619cam a22002177a 4500 | ||
|---|---|---|---|
| 001 | 001634 | ||
| 003 | armpuni | ||
| 005 | 20160923150155.0 | ||
| 008 | 160923s1989####xx#a##########000#0#und#d | ||
| 040 |
_aarmpuni _carmpuni |
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| 041 | _aen | ||
| 080 | _a66.08/.09 | ||
| 100 | 1 | _aHess, Dennis W. | |
| 245 | 1 | 0 |
_aMICROELECTRONICS processing : _bchemical engineering aspects / _cDennis W. Hess, Klavis F. Jensen |
| 260 |
_aWashington : _bAmerican Chemical Society, _c1989 |
||
| 300 | _a547 p.;, 23,5 cm. | ||
| 650 | 7 |
_aCONICET _2LEMB |
|
| 700 | 1 | _aJensen, Klavis F. | |
| 942 |
_cLB _2cdu |
||
| 945 |
_aInfor _d20/08/98-08-20 |
||
| 999 |
_c1633 _d2808 |
||