| 000 | 00871cam a22002894a 4500 | ||
|---|---|---|---|
| 001 | 15423099 | ||
| 003 | armpuni | ||
| 005 | 20240321124522.0 | ||
| 008 | 080822s2008 gw a b 001 0 eng c | ||
| 010 | _a 2008459617 | ||
| 020 | _a9783527314942 | ||
| 035 | _a(OCoLC)ocn188552319 | ||
| 040 | _carmpuni | ||
| 042 | _apcc | ||
| 082 | 0 | 0 |
_a621 _222 |
| 245 | 0 | 0 |
_aReliability of MEMS / _cedited by Osamu Tabata and Toshiyuki Tsuchiya. |
| 260 |
_aWeinheim : _bWiley-VCH, _cc2008. |
||
| 300 |
_axx, 303 p. : _bill. ; _c25 cm. |
||
| 440 | 0 |
_aAdvanced micro & nanosystems ; _vv.6 |
|
| 500 | _a"Testing of materials and devices"--Cover. | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSISTEMAS MICROELECTROMECĂNICOS _xFIABILIDAD |
|
| 650 | 0 | _aMEMS | |
| 700 | 1 | _aTsuchiya, Toshiyuki. | |
| 700 | 1 |
_aTabata, Osamu, _d1956- |
|
| 942 |
_2cdu _cLB |
||
| 999 |
_c7726 _d8901 |
||