TY  - BOOK
AU  - Tsuchiya,Toshiyuki
AU  - Tabata,Osamu
TI  - Reliability of MEMS
SN  - 9783527314942
U1  - 621 22
PY  - 2008///
CY  - Weinheim
PB  - Wiley-VCH
KW  - SISTEMAS MICROELECTROMECÁNICOS
KW  - FIABILIDAD
KW  - MEMS
N1  - "Testing of materials and devices"--Cover; Includes bibliographical references and index
ER  -