Reliability of MEMS / edited by Osamu Tabata and Toshiyuki Tsuchiya. - Weinheim : Wiley-VCH, c2008. - xx, 303 p. : ill. ; 25 cm. - Advanced micro & nanosystems ; v.6 .

"Testing of materials and devices"--Cover.

Includes bibliographical references and index.

ISBN: 9783527314942

LCCN: 2008459617

Subjects--Topical Terms:
SISTEMAS MICROELECTROMECÁNICOS--FIABILIDAD
MEMS

Dewey Class. No.: 621